Degradation of salicylic acid (SA) with thin film photocatalyst, titanium dioxide (TiO2) and nitrogen-doped TiO2 (TiO2−x-Nx) combined with ultraviolet (UV) radiation was studied. TiO2 film with thickness of 15 and 65 nm was tested. The TiO2−x-Nx film had thickness of 15 nm on top of TiO2 (50 nm). Photocatalysts were prepared on glass substrate by atomic layer deposition (ALD) technique. The effect of initial pH (3–10) was studied with SA concentration of 10 mg/l. Decomposition of SA was fastest at pH 6 with both films and the rate was equal at initial pH values 3 and 4.3. However, at higher pH values the non-doped film was more efficient.

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